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How OPC Works
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Lithography Sim
aerial image
Simulate
Mask → Contour
OPC Auto-Correct
model-based
Correct
OPC · 3 iter
Mask Setup
Imaging Tool
DUV | 193 nm Dry
EUV | 13.5 nm Low-NA
Pattern
Iso Line (DUV)
Dense L/S
Square (DUV)
Line-End (DUV)
L-Shape (DUV)
Reinitialize
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Export
Import
Exposure
Dose (threshold)
lit
opc
Studio
Canvas
Set-up
Edit
3D
View
Layers
Legend
Contour
Target
Aerial
Ruler
3D
Background
Dark
Light
Aerial
Opacity
58%
Colormap
Apple (default)
Plasma
Viridis
Hot
Grayscale
Ice
Contour
Classic
Neon
Gold
Minimal
EPE Overlay
Off
Color
Arrows
Both
Export
Resolution
Web
High-Res ★
Figure PNG
Figure SVG
3D Surface PNG (Pro)
Runs CSV
Copy Caption
★ Pro unlocks high-resolution export (up to 4200px).
Run to simulate
Final Mask
Contour
Aerial
Target
Ruler
Mask
Contour
?
2D↔3D
3D Ctrl
+ Classic
✦ Cosmic
Run simulation to generate 3D aerial surface.
Edit
Workspace
Mask
Target
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→
Target
Target
→
Mask
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Edit Tools
Mask editing
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Selections
Feature selected
Mask Feature
M1
Manual Edits
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Assist Setup
Selection ready
Hammerhead Edge
Left
Right
Top
Bottom
Serif Corner
Top Left
Top Right
Bottom Left
Bottom Right
Mousebite Edge
Left
Right
Top
Bottom
SRAF Orientation
Horizontal
Vertical
Inspector
100 × 900 nm
M1
Local
Global
X (nm)
Y (nm)
Width (nm)
Height (nm)