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Set-up
Studies
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1
Pattern
How OPC works ›
Iso line
Dense L/S
Square
L-shape
Pro
Tip to tip
Pro
Corners
Pro
Contacts
Custom
More patterns (1)
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CD
nm
Length
nm
Sets the mask and its target. Fine-tune single shapes in Edit.
Imaging tool
DUV | 193 nm Dry
EUV | 13.5 nm Low-NA
Reset
Blank
Save file
Pro
Open file
Pro
Threshold
Defocus
Source
Conventional σ 0.7
Conventional σ 0.4
Annular 0.5–0.8
Annular 0.65–0.9
Pro
Best focus · Rayleigh depth of focus ±112 nm
2
Simulate
Simulate
3
Correct
OPC · 3 iterations
Correct the mask
lit
opc
Studio
Focus
Set-up
Edit
3D
View
View
Colormap
Spectrum
Hot
Grayscale
Silver
Range
100%
Transparency
0%
Layers
Intensity
Contour
Target
Legend
EPE
Off
Color
Arrows
Both
Simulate a pattern with a target to show EPE.
3D
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Rendered
Diagram
Light
Camera
Isometric
Front
Top
Azimuth
0°
Elevation
72.5°
Roll
0°
Drag to rotate · Shift + drag to pan
Appearance
Light
Dark
Rulers
Export
Resolution
Web
High-Res ★
Figure PNG
Figure SVG
3D Surface PNG (Pro)
Runs CSV (Pro)
Copy Caption
★ Pro unlocks high-resolution (up to 4200px) and CSV export.
200 nm
field 1100 nm
FOV 1100 nm · run to simulate
Mask
Contour
Aerial
Target
2D↔3D
Preparing 3D…
Run simulation to generate 3D aerial surface.
Edit
How it works
Target
Mask
What you want printed. Simulate shows how it prints; Correct reshapes the mask to match it.
Mask follows Target
Edit the target freely; the mask copies it until you edit the mask or run Correct.
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Target shapes
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Height
T1
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